Spatially Resolved Spectroscopic Extreme Ultraviolet Reflectometry for Laboratory Applications

Stevenson Ranch, Calif / American Scientific Publ. (2019) [Journal Article]

Journal of nanoscience and nanotechnology
Volume: 19
Issue: 1
Page(s): 562-567

Authors

Selected Authors

Tryus, Maksym
Herbert, Stefan
Wilson, Daniel
Bahrenberg, Lukas
Danylyuk, Serhiy

Other Authors

Juschkin, Larissa

Identifier