Effect of damage incubation in the laser grooving of sapphire

Melville, NY / American Inst. of Physics (2019) [Journal Article]

Journal of applied physics
Volume: 125
Issue: 17
Page(s): 173109

Authors

Selected Authors

Sakurai, Haruyuki
He, Chao
Konishi, Kuniaki
Tamaru, Hiroharu
Yumoto, Junji

Other Authors

Kuwata-Gonokami, Makoto
Gillner, Arnold

Identifier