Modelling of chemical processes in the dynamic expansion for pulsed laser deposition

Bellingham, Wash / SPIE (2002) [Contribution to a book, Contribution to a conference proceedings]

Photon processing in microelectronics and photonics : 21 - 24 January 2002, San Jose, USA / sponsored and publ. by SPIE, the International Society for Optical Engineering. Koji Sugioka ..., chair/ed
Page(s): 54-63



Kreutz, Ernst Wolfgang
Aden, Mirko
Niessen, Markus
Husmann, Andreas
Poprawe, Reinhart