Actinic EUV-Mask metrology: tools, concepts, components

Lebert, Rainer (Author); Farahzadi, Azadeh (Author); Diete, Wolfgang (Author); Schäfer, David (Author); Phiesel, Wolfgang (Author); Wilhein, Thomas (Author); Herbert, Stefan (Author); Maryasov, Aleksey (Author); Juschkin, Larissa (Author); Esser, Dominik (Author); Hoefer, Marko (Author); Hoffmann, Dieter (Author)

Bellingham, Wa / SPIE (2011) [Contribution to a book, Contribution to a conference proceedings]

27th European Mask and Lithography Conference : 18 - 19 January 2011, Dresden, Germany / organized by VDE/VDI GMM - the Society for Microelectronics, Micro- and Precision Engineering (Germany). Uwe F. W. Behringer, ed.
Page(s): 79850-B, 6 S.

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