Micro/nano manufacturing with lasers
Preliminary semester planning
ContentsCopyright: Fraunhofer ILT, Aachen / Volker Lannert
The lecture course deals with the application of laser radiation in micro / nano technology, electronic engineering and precision engineering. Besides these rather traditional application areas also medical technology, biotechnology and micro-chemistry are fields of application. At the beginning of the lecture course the fundamentals of photon-material interaction are covered. Both equilibrium and non-equilibrium processes are considered for ultra-short pulse processing. On this basis the energy transfer by heat conduction for different materials is discussed. These fundamental explanations serve as a basis for the introduction of various classic laser micro-machining processes such as ablation, drilling and joining as well as processes such as photochemical and photothermal material modification, photopolymerization, lithography and multi-beam interference for nano structuring. In addition to considering the fundamentals of the various processes the possible laser sources and the required system technology are covered. In this context also methods for establishing a process control are explained and presented.
|Tutorial||Contact M.Eng. Maximilian Brosda|
Chair for Laser Technolog