Processing ceramics by laser radiation

Kreutz, Ernst Wolfgang; Jandeleit, J├╝rgen; Weichenhain, Ruth; Sommer, Manfred; Horn, Alexander; Curdt, A.

Bellingham, Wash : SPIE (1998)
Contribution to a book, Contribution to a conference proceedings

In: Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California. Sponsored and publ. by SPIE, the International Society for Optical Engineering. Jan J. Dubowski; Peter E. Dyer, chairs/ed
Page(s)/Article-Nr.: 36-43