Modelling of chemical processes in the dynamic expansion for pulsed laser deposition

Kreutz, Ernst Wolfgang; Aden, Mirko; Niessen, Markus; Husmann, Andreas; Poprawe, Reinhart

Bellingham, Wash : SPIE (2002)
Contribution to a book, Contribution to a conference proceedings

In: Photon processing in microelectronics and photonics : 21 - 24 January 2002, San Jose, USA / sponsored and publ. by SPIE, the International Society for Optical Engineering. Koji Sugioka ..., chair/ed
Page(s)/Article-Nr.: 54-63