Laser and pinch plasmas X-ray sources for microscopy and lithography. SPIE proc. 2015 (1993), S. 32-44

Berlin ; Offenbach / VDE-Verl. (1993) [Contribution to a book, Contribution to a conference proceedings]

Proceedings / SPIE, International Society for Optical Engineering : P. - 2015
Page(s): 32-44

Authors

Selected Authors

Neff, W.
Rothweiler, D.
Eidmann, K.
Lebert, R.
Richter, F.

Other Authors

Winhart, G.

Identifier

  • REPORT NUMBER: RWTH-CONV-193188