Laser polishing

Bellingham, Wash / SPIE (2012) [Contribution to a book, Contribution to a conference proceedings]

Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XVII : 23 - 26 January 2012, San Francisco, California, United States ; [part of SPIE Photonics West] / sponsored and publ. by SPIE. Guido Hennig ..., ed. 2012, San Francisco, CA
Page(s): 82430W

Authors

Authors

Temmler, André
Willenborg, Edgar
Wissenbach, Konrad

Identifier