In-situ diagnostics on fs-laser induced modification of glasses for selective etching

Bellingham, Wash / SPIE (2012) [Contribution to a book, Contribution to a conference proceedings]

Laser-based micro- and nanopackaging and assembly VI : 24 - 26 January 2012, San Francisco, California, United States ; [Conference LBMP-VI ... as part of LASE at Photonics West] / sponsored and publ. by SPIE. Friedrich G. Bachmann ..., ed. , 2012, San Francisco, CA
Page(s): 82440E



Hermans, Martin
Gottmann, Jens
Schiffer, Anna