EUV dark-field microscopy for defect inspection

Melville, N. Y / AIP (2011) [Contribution to a book, Contribution to a conference proceedings]

The 10th international conference on X-ray microscopy : Chicago, Illinois, USA 15 – 20 August 2010 / ed by SIan McNulty ... Sponsoring organizations: U.S. Department of Energy ...
Page(s): 265-268

Authors

Selected Authors

Juschkin, Larissa
Maryasov, Aleksey
Herbert, Stefan
Aretz, Anke
Bergmann, Klaus

Other Authors

Lebert, Rainer

Identifier