Nd : YAG laser micromachining of SiC precision structures for MEMS

Kreutz, Ernst Wolfgang; Weichenhain, Ruth; Horn, Alexander

Bellingham, Wash : SPIE, the International Society for Optical Engineering (2001)
Buchbeitrag, Beitrag zu einem Tagungsband

In: MEMS design, fabrication, characterization, and packaging : 30 May - 1 June 2001, Edinburgh, UK / sponsored and publ. by SPIE, the International Society for Optical Engineering. Uwe F. W. Behringer .̤, chairs/ed
Seite(n)/Artikel-Nr.: 109-118

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