Nd : YAG laser micromachining of SiC precision structures for MEMS

Bellingham, Wash / SPIE, the International Society for Optical Engineering (2001) [Contribution to a book, Contribution to a conference proceedings]

MEMS design, fabrication, characterization, and packaging : 30 May - 1 June 2001, Edinburgh, UK / sponsored and publ. by SPIE, the International Society for Optical Engineering. Uwe F. W. Behringer .̤, chairs/ed
Page(s): 109-118

Authors

Authors

Kreutz, Ernst Wolfgang
Weichenhain, Ruth
Horn, Alexander

Identifier