3D-Microstructuring of sapphire using fs-laser irradiation and selective etching

Osaka / Japan Laser Processing Society (2010) [Journal Article]

Journal of laser micro/nanoengineering
Volume: 5
Issue: 2
Page(s): 145-149

Authors

Authors

Hörstmann-Jungemann, Maren
Gottmann, Jens
Keggenhoff, Martin

Identifier