High speed and high precision Fs-laser writing using a scanner with large numerical aperture

Osaka / Japan Laser Processing Society (2009) [Journal Article]

Journal of laser micro/nanoengineering
Volume: 4
Issue: 3
Page(s): 192-196

Authors

Authors

Gottmann, Jens
Hörstmann-Jungemann, Maren
Hermans, Martin
Beckmann, Dennis

Identifier

  • REPORT NUMBER: RWTH-CONV-013982