Narrowband laser produced extreme ultraviolet sources adapted to silicon/molybdenum multilayer optics

Melville, NY / IOP Publ. (1998) [Journal Article]

Journal of applied physics
Volume: 83
Issue: 9
Page(s): 4566-4571

Authors

Authors

Schriever, Guido
Bergmann, Klaus
Lebert, Rainer

Identifier