Excimer-laser patterning of copper in LDE (laser dry etching)

Amsterdam [u.a.] / Elsevier (1997) [Journal Article]

Applied surface science
Volume: 109/110
Page(s): 194-200

Authors

Authors

Pfleging, W.
Vörckel, A.
Duddek, H.
Wesner, D. A.
Kreutz, Ernst Wolfgang

Identifier