CCl4-assisted CF4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process

Amsterdam [u.a.] / North-Holland (1996) [Contribution to a conference proceedings, Journal Article]

Applied surface science
Volume: 96-98
Issue: 2
Page(s): 496-500

Authors

Authors

Pfleging, Wilhelm
Wesner, David A.
Kreutz, Ernst Wolfgang

Identifier