Deposition of ceramics by LPVD

Amsterdam [u.a.] / Elsevier (1992) [Journal Article]

Applied surface science
Volume: 54

Authors

Selected Authors

Funken, J.
Kreutz, E. W.
Krösche, M.
Sung, H.
Voss, A.

Other Authors

Erkens, G.
Lemmer, O.
Leyendecker, T.

Identifier

  • REPORT NUMBER: RWTH-CONV-055246