Investigation of plasma expansion in the PLD process by means of an electrical probe

Bristol / IOP Publ. (1994) [Journal Article]

Plasma sources science & technology
Volume: 3
Page(s): 128-133

Authors

Selected Authors

Brcka, J.
Alunovic, Mirka
Voss, A.
Kreutz, E. W.

Identifier

  • REPORT NUMBER: RWTH-CONV-058791