Nano- and Microstructuring of SiO(2) and Sapphire with Fs-laser Induced Selective Etching

Osaka / Japan Laser Processing Society (2009) [Journal Article]

Journal of laser micro/nanoengineering
Volume: 4
Issue: 2
Page(s): 135-140

Authors

Authors

Hörstmann-Jungemann, Maren
Gottmann, Jens
Wortmann, Dirk

Identifier