Broadband transmission masks, gratings and filters for extreme ultaviolet and soft X-ray lithography

Amsterdam [u.a.] / Elsevier (2012) [Journal Article]

Thin solid films
Volume: 520
Issue: 15
Page(s): 5080-5085


Selected Authors

Brose, Sascha
Danylyuk, Serhiy
Juschkin, Larissa
Dittberner, Carsten
Bergmann, Klaus

Other Authors

Moers, J├╝rgen
Panaitov, Gregory
Trellenkamp, Stefan
Loosen, Peter
Gr├╝tzmacher, Detlev