Laser transmission bonding of silicon to silicon with metallic interlayers for wafer-level packaging

Berlin [u.a.] / Springer (2012, 2013) [Contribution to a conference proceedings, Journal Article]

Microsystem technologies
Volume: 19
Issue: 5
Page(s): 669-673

Authors

Authors

Wissinger, Ansgar
Olowinsky, Alexander
Gillner, Arnold
Poprawe, Reinhart

Identifier