High speed micro scanner for 3D in-volume laser micro-processing

Bellingham, Wash / SPIE (2013) [Contribution to a book, Contribution to a conference proceedings]

Laser-based micro- and nanopackaging and assemby VII : 6 - 7 February 2013, San Francisco, California, United States ; [LBMP VII ... part of LASE 2013 at Photonics West] / sponsored and publ. by SPIE. Udo Klotzbach ..., ed.
Page(s): 8608 08, 6 S.



Schäfer, Dagmar
Gottmann, Jens
Hermans, Martin
Ortmann, Jürgen
Kelbassa, Ingomar