Laser-induced writing of electrically conductive structures in the surface of AlN

Stolz, Beate; Kreutz, Ernst Wolfgang; Poprawe, Reinhart

Berlin : VDE-Verl. [u.a.] (1999)
Buchbeitrag, Beitrag zu einem Tagungsband

In: Smart structures and materials 1999 - Smart materials technologies / [SPIE Conference on Smart Materials Technologies], 3 - 4 March 1999, Newport Beach, California. Sponsored by SPIE, the International Society for Optical Engineering. Manfred Wuttig, chair/ed.
Seite(n)/Artikel-Nr.: 190-201