UV laser beam shaping by multifaceted beam integrators : fundamental principles and advanced design concepts

Henning, Thomas F. E.; Unnebrink, Lars; Scholl, Marcus

Bellingham, Wash : SPIE (1996)
Buchbeitrag, Beitrag zu einem Tagungsband

In: Lasers as tools for manufacturing of durable goods and microelectronics : 29 January - 2 February 1996, San Jose, California / sponsored and publ. by SPIE, the International Society for Optical Engineering. Jan J. Dubowski ..., chairs/ed
Seite(n)/Artikel-Nr.: 62-73