UV laser beam shaping by multifaceted beam integrators : fundamental principles and advanced design concepts

Bellingham, Wash / SPIE (1996) [Contribution to a book, Contribution to a conference proceedings]

Lasers as tools for manufacturing of durable goods and microelectronics : 29 January - 2 February 1996, San Jose, California / sponsored and publ. by SPIE, the International Society for Optical Engineering. Jan J. Dubowski ..., chairs/ed
Page(s): 62-73



Henning, Thomas F. E.
Unnebrink, Lars
Scholl, Marcus