Microwave-assisted laser dry etching of silicon

Bellingham, Wash / SPIE (1995) [Contribution to a book, Contribution to a conference proceedings]

Laser-induced thin film processing : 8-10 February 1995, San Jose, California / sponsored and publ. by SPIE, the International Society for Optical Engineering. Jan J. Dubowski, chair/ed
Page(s): 387-393

Authors

Authors

Pfleging, Wilhelm
Kreutz, Ernst Wolfgang
Wehner, Martin
Lupp, Friedrich G.

Identifier