Microwave-assisted laser dry etching of silicon
Bellingham, Wash / SPIE (1995) [Contribution to a book, Contribution to a conference proceedings]
Laser-induced thin film processing : 8-10 February 1995, San Jose, California / sponsored and publ. by SPIE, the International Society for Optical Engineering. Jan J. Dubowski, chair/ed
Kreutz, Ernst Wolfgang
Lupp, Friedrich G.