Mask adapted beam shaping for material processing with excimer laser radiation
Bellingham, Wash / SPIE, the International Society for Optical Engineering (1998) [Contribution to a book, Contribution to a conference proceedings]
Optika '98, 5th Congress on Modern Optics, 14 - 17 September 1998, Budapest, Hungary / organized by Scientific Society for Optics, Acoustics, Motion Picture and Theater Technology (OPAKFI) ... György Ákos ..., ed
Bernges, Jörg Heinz
Henning, Thomas F. E.
Kreutz, Ernst W.