Mask adapted beam shaping for material processing with excimer laser radiation

Bellingham, Wash / SPIE, the International Society for Optical Engineering (1998) [Contribution to a book, Contribution to a conference proceedings]

Optika '98, 5th Congress on Modern Optics, 14 - 17 September 1998, Budapest, Hungary / organized by Scientific Society for Optics, Acoustics, Motion Picture and Theater Technology (OPAKFI) ... György Ákos ..., ed
Page(s): 108-111

Authors

Authors

Bernges, Jörg Heinz
Unnebrink, Lars
Henning, Thomas F. E.
Kreutz, Ernst W.
Poprawe, Reinhart

Identifier