Optical system design for excimer laser materials processing

Bellingham, Wash / SPIE (1999) [Contribution to a book, Contribution to a conference proceedings]

Current developments in optical design and optical engineering VIII : 19 - 21 July 1999, Denver, Colorado / [SPIE Conference on EUV, X-ray, and Gamma-ray Instrumentation for Astronomy]. Sponsored and publ. by SPIE, the International Society for Optical Engineering. Robert E. Fischer ..., chairs/ed
Page(s): 413-422



Unnebrink, Lars
Henning, Thomas F. E.
Kreutz, Ernst Wolfgang
Poprawe, Reinhart