Properties of cubic boron nitride thin films deposited by a hybrid RF-PLD-technique

Amsterdam [u.a.] / Elsevier, [u.a.] (1998) [Contribution to a conference proceedings, Journal Article]

Surface & coatings technology
Volume: 100
Issue: 1/3
Page(s): 388-392

Authors

Authors

Klotzb├╝cher, T.
Mergens, M.
Wesner, D. A.
Kreutz, E. W.

Identifier