Selective, laser induced etching of fused silica at high scan-speeds using KOH

Osaka / JLPS, Japan Laser Processing Society (2014) [Journal Article]

Journal of laser micro/nanoengineering
Volume: 9
Issue: 2
Page(s): 126-131

Authors

Selected Authors

Hermans, Martin
Gottmann, Jens
Riedel, FRank

Identifier