Fabrication of Hierarchical Structures by Direct Laser Writing and Multi-Beam-Interference

Tokyo / Sumitomo Corp (2013) [Contribution to a conference proceedings]

LAMP2013: The 6th International Congress on Laser Advanced Materials Processing ; LPM2013, the 14th International Symposium on Laser Precision Microfabrication ; HPL2013, the 6th International Symposium on High Power Laser Processing ; Niigata, July 23 -26th, 2013 ; [congress program & technical digest]


Selected Authors

Steger, M.
Hartmann, C.
Beckemper, S.
Holtkamp, J.
Gillner, A.


  • REPORT NUMBER: RWTH-2015-02432