High precision and high aspect ratio laser drilling: challenges and solutions

Bellingham, Wash / SPIE (2016) [Contribution to a book, Contribution to a conference proceedings]

High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V : 16-18 February 2016, San Francisco, California, United States / Friedhelm Dorsch, Stefan Kaierle, editors ; sponsored and published by SPIE
Page(s): 974106

Abstract

Authors

Authors

Uchtmann, Hermann
He, Chao
Gillner, Arnold

Identifier