In situ investigation of production processes in a large chamber scanning electron microscope

Amsterdam / Elsevier Science (2018) [Journal Article]

Ultramicroscopy
Volume: 193
Page(s): 151-158

Authors

Selected Authors

Aretz, Anke
Ehle, Lisa Christine
Häusler, André
Bobzin, Kirsten
Öte, Mehmet

Other Authors

Wiesner, Stefanie
Schmidt, Alexander
Gillner, Arnold
Poprawe, Reinhart
Mayer, Joachim

Identifier