Advanced in-situ diagnostics of ultra short pulsed micromachining in glass

Bellingham, Washington / SPIE (2018) [Contribution to a book, Contribution to a conference proceedings]

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII : 29-31 January 2018, San Francisco, California, United States / Beat Neuenschwander, Costas P. Grigoropoulos, Tetsuya Makimura, Gediminas Rańćiukaitis (editors) ; sponsored by: SPIE
Page(s): 105190C


Selected Authors

Grossmann, Daniel
Jenne, Michael
Flamm, Daniel
Kleiner, Jonas
Zimmermann, Felix

Other Authors

Kumkar, Malte