EUV dark-field microscopy for nanoscale defect inspection

Jülich [u.a.] / Forschungszentrum Jülich ; RWTH Aachen University (2010) [Contribution to a book]

JARA FIT Jülich Aachen Research Alliance for Fundamentals of Future Information Technologies : Annual Report 2009 / Eds.: Wolfgang Albrecht, Markus Morgenstern, Detlev Grützmacher
Page(s): 91-92

Authors

Selected Authors

Maryasov, Aleksey
Herbert, Stefan
Juschkin, Larissa
Brose, Sascha
Aretz, A.

Other Authors

Heiss, A.
Trellenkamp, St.
Loosen, Peter

Identifier

  • REPORT NUMBER: RWTH-CONV-105572